"반도체 제조장비·부품 기술·특허 정보 한눈에“

지식재산처 해설집 발간

2026.07.09 11:51 입력

<div align="" style=""><p> </p><table _id="news_image" border="0" cellpaddin="0" cellspacing="0" align="center" style="border:1px solid #d2d2d2;margin-top:15px;margin-bottom:15px;"><tbody><tr><td><div style="margin:8px"><img alt=""반도체 제조장비·부품 기술·특허 정보 한눈에“" src="http://www.kpaanews.or.kr/PEG/17835654019621.jpg" width="698" align="absmiddle"></div></td></tr></tbody></table><p> </p><p style="text-align: justify; line-height: 1.8;" align="justify"><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">지식재산처가 반도체 제조장비와 핵심 부품의 기술</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">·</span><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">특허 정보를 체계적으로 담은 해설집을 발간했다</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">. </span></p><p style="text-align: justify; line-height: 1.8;" align="justify"><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;"> </span></p><p style="text-align: justify; line-height: 1.8;" align="justify"><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">특허심사 전문성 제고와 산업계 특허전략 수립 도움을 주기 위해서다</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">.</span></p><p style="text-align: justify; line-height: 1.8;" align="justify"> </p><p class="0" style="text-align: justify; letter-spacing: 0pt; line-height: 1.8;" align="justify"><span style="font-family: 굴림, gulim; font-size: 12pt;">지식재산처는 반도체 분야 특허심사의 전문성과 산업계의 특허 경쟁력 강화를 위해 </span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">'</span><span style="font-family: 굴림, gulim; font-size: 12pt;">반도체 제조장비</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">·</span><span style="font-family: 굴림, gulim; font-size: 12pt;">부품 해설집 전</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(</span><span style="font-family: 굴림, gulim; letter-spacing: 0pt; font-size: 12pt;">前</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">)</span><span style="font-family: 굴림, gulim; font-size: 12pt;">공정 편</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">'</span><span style="font-family: 굴림, gulim; font-size: 12pt;">을 발간해 누리집 등을 통해 디지털로 배포한다고 </span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">5</span><span style="font-family: 굴림, gulim; font-size: 12pt;">일 밝혔다</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">.</span></p><p class="0" style="text-align: justify; letter-spacing: 0pt; line-height: 1.8;" align="justify"><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;"> </span></p><p class="0" style="text-align: justify; letter-spacing: 0pt; line-height: 1.8;" align="justify"><span style="font-family: 굴림, gulim; font-size: 12pt;">반도체 제조공정은 전공정과 후공정으로 이뤄지는데</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">, </span><span style="font-family: 굴림, gulim; font-size: 12pt;">해설집은 반도체 전공정의 핵심 </span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">8</span><span style="font-family: 굴림, gulim; font-size: 12pt;">대 단위공정인 클리닝</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(Cleaning), </span><span style="font-family: 굴림, gulim; font-size: 12pt;">확산</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(Diffusion), </span><span style="font-family: 굴림, gulim; font-size: 12pt;">화학기상증착</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(CVD), </span><span style="font-family: 굴림, gulim; font-size: 12pt;">물리기상증착</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(PVD), </span><span style="font-family: 굴림, gulim; font-size: 12pt;">화학기계적평탄화</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(CMP), </span><span style="font-family: 굴림, gulim; font-size: 12pt;">노광</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(Photo), </span><span style="font-family: 굴림, gulim; font-size: 12pt;">식각</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(Etching), </span><span style="font-family: 굴림, gulim; font-size: 12pt;">이온주입</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(IMP)</span><span style="font-family: 굴림, gulim; font-size: 12pt;">을 중심으로 구성됐다</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">.</span></p><p class="0" style="text-align: justify; letter-spacing: 0pt; line-height: 1.8;" align="justify"><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;"> </span></p><p class="0" style="text-align: justify; letter-spacing: 0pt; line-height: 1.8;" align="justify"><span style="font-family: 굴림, gulim; font-size: 12pt;">각 공정에서 사용되는 주요 제조장비와 핵심 부품을 한눈에 이해할 수 있도록 체계적으로 정리했다</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">.</span></p><p class="0" style="text-align: justify; letter-spacing: 0pt; line-height: 1.8;" align="justify"><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;"> </span></p><p class="0" style="text-align: justify; letter-spacing: 0pt; line-height: 1.8;" align="justify"><span style="font-family: 굴림, gulim; font-size: 12pt;">민간에서 평균 </span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">28</span><span style="font-family: 굴림, gulim; font-size: 12pt;">년 이상의 실무경험을 가진 반도체 전문 심사관들이 직접 집필에 참여했다</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">.</span></p><p class="0" style="text-align: justify; letter-spacing: 0pt; line-height: 1.8;" align="justify"><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;"> </span></p><p style="text-align: justify; line-height: 1.8;" align="justify"><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">주요 장비와 부품의 형상</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(</span><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">사진</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">), </span><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">기능</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">, </span><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">특허분류</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">(CPC·F-term), </span><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">심사 시 유의사항</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">, </span><span style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">주요 국내외 관련 기업 정보 등을 함께 수록해 심사와 특허전략 수립에 직접 활용할 수 있도록 구성한 것이 특징이다</span><span lang="EN-US" style="letter-spacing: 0pt; font-family: 굴림, gulim; font-size: 12pt;">.</span></p></div><p align="" style=""> </p>

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